Confocal scanning microscopes; optical inspection apparatus for industrial use, namely, photomask and reticle inspection apparatus, LCD color filter inspection system for silicon wafers and mask blanks, and thin film transister inspection apparatus; LCD color filter and TFT defect repair systems consisting primarily of tape grinding and film thermal transfer apparatus; phase-shift mask measurement systems for photomask comprising electronic-based instruments for measuring phase shift

'apparatus':6,15,32,50 'base':62 'blank':26 'color':17,34 'compris':59 'confoc':1 'consist':41 'defect':38 'electron':61 'electronic-bas':60 'film':29,47 'filter':18,35 'grind':45 'industri':8 'inspect':5,14,19,31 'instrument':63 'lcd':16,33 'mask':25,54 'measur':55,65 'microscop':3 'name':10 'optic':4 'phase':52,66 'phase-shift':51 'photomask':11,58 'primarili':42 'repair':39 'reticl':13 'scan':2 'shift':53,67 'silicon':22 'system':20,40,56 'tape':44 'tft':37 'thermal':48 'thin':28 'transfer':49 'transist':30 'use':9 'wafer':23

LASERTEC

Owners

Goods & Services