Optical System comprised of beam shaping, homogenizing and projection optics for thermal processing of thin silicon layers for electronics and semiconductor industry, using a frequency-converted solid state laser and a spherical projection objective to create a narrow line of laser light on the substrate which is heated by the laser beam

'beam':5,53 'compris':3 'convert':27 'creat':37 'electron':19 'frequenc':26 'frequency-convert':25 'heat':49 'homogen':7 'industri':22 'laser':30,42,52 'layer':17 'light':43 'line':40 'narrow':39 'object':35 'optic':1,10 'process':13 'project':9,34 'semiconductor':21 'shape':6 'silicon':16 'solid':28 'spheric':33 'state':29 'substrat':46 'system':2 'thermal':12 'thin':15 'use':23

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