computer software for use with electron and ion-beam microscopes that uses the EDS (Energy Dispersive Spectroscopy) microanalysis technique to calculate the various film thicknesses and compositions that are present in a sample; computer software for measuring samples inside microscopes, including electron and ion-beam microscopes; computer software for processing X-ray data acquired from multi-layered samples inside an electron or ion-beam microscope to calculate the various film thicknesses and compositions that are present

'acquir':57 'beam':10,47,69 'calcul':22,72 'composit':28,78 'comput':1,35,49 'data':56 'dispers':17 'ed':15 'electron':6,43,65 'energi':16 'film':25,75 'includ':42 'insid':40,63 'ion':9,46,68 'ion-beam':8,45,67 'layer':61 'measur':38 'microanalysi':19 'microscop':11,41,48,70 'multi':60 'multi-lay':59 'present':31,81 'process':52 'ray':55 'sampl':34,39,62 'softwar':2,36,50 'spectroscopi':18 'techniqu':20 'thick':26,76 'use':4,13 'various':24,74 'x':54 'x-ray':53

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