Thin film processing machines, namely, machines that etch nano-scale features into silicon wafers; semiconductor wafer processing machines; etch technology processing machines, namely, machines that etch nano-scale features into silicon wafers; deposition technology processing machines for the manufacture and processing of computer hardware, computer software, and computer components, namely, semiconductors, integrated circuits, and flat panel displays

'circuit':55 'compon':51 'comput':45,47,50 'deposit':35 'display':59 'etch':8,20,27 'featur':12,31 'film':2 'flat':57 'hardwar':46 'integr':54 'machin':4,6,19,23,25,38 'manufactur':41 'name':5,24,52 'nano':10,29 'nano-scal':9,28 'panel':58 'process':3,18,22,37,43 'scale':11,30 'semiconductor':16,53 'silicon':14,33 'softwar':48 'technolog':21,36 'thin':1 'wafer':15,17,34

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