Automatic wafer handler for transport of semiconductor wafers in a semiconductor wafer processing equipment and components thereof, namely, vacuum transport chamber with robotic wafer handling equipment for transporting wafers to and from semiconductor processing reactors, and parts and accessories thereof

'accessori':39 'automat':1 'chamber':21 'compon':16 'equip':14,26 'handl':25 'handler':3 'name':18 'part':37 'process':13,34 'reactor':35 'robot':23 'semiconductor':7,11,33 'thereof':17,40 'transport':5,20,28 'vacuum':19 'wafer':2,8,12,24,29

LEAN PLATFORM

Owner

Goods & Services