Measuring apparatus and instruments, namely precision measuring machines and instruments, namely photo mask inspection machines

'apparatus':2 'inspect':14 'instrument':4,10 'machin':8,15 'mask':13 'measur':1,7 'name':5,11 'photo':12 'precis':6

Semi-conductors, liquid crystal and electronic components manufacturing apparatus, namely electron beam exposure devices, electron beam lithography machine, photo mask manufacturing machine

'apparatus':10 'beam':13,17 'compon':8 'conductor':3 'crystal':5 'devic':15 'electron':7,12,16 'exposur':14 'liquid':4 'lithographi':18 'machin':19,23 'manufactur':9,22 'mask':21 'name':11 'photo':20 'semi':2 'semi-conductor':1

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