machines for depositing a layer of silicon wafer in the semiconductor industry; industrial robots being electronically controlled apparatus and replacement parts therefor

'apparatus':18 'control':17 'deposit':3 'electron':16 'industri':12,13 'layer':5 'machin':1 'part':21 'replac':20 'robot':14 'semiconductor':11 'silicon':7 'therefor':22 'wafer':8

semiconductor wafer processing equipment, namely, thermal treatment reactors and chemical vapor deposition reactors, including components and replacement parts therefor

'chemic':10 'compon':15 'deposit':12 'equip':4 'includ':14 'name':5 'part':18 'process':3 'reactor':8,13 'replac':17 'semiconductor':1 'therefor':19 'thermal':6 'treatment':7 'vapor':11 'wafer':2

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