Interactive maintenance guide software to decrease customer support costs by reducing mean time to repair (MTTR), improving lithography tool uptime, and enhancing the overall quality of manufacturer service activities of lithography machines; operating software to optimize lithography tool performance for the production of semiconductor chips; operating software for use with heat treating, cleaning, etching, implanting and leveling machines for use in the manufacture of semiconductors; and manuals sold as a unit with the aforesaid goods

'activ':29 'aforesaid':74 'chip':45 'clean':53 'cost':9 'custom':7 'decreas':6 'enhanc':22 'etch':54 'good':75 'guid':3 'heat':51 'implant':55 'improv':17 'interact':1 'level':57 'lithographi':18,31,37 'machin':32,58 'mainten':2 'manual':67 'manufactur':27,63 'mean':12 'mttr':16 'oper':33,46 'optim':36 'overal':24 'perform':39 'product':42 'qualiti':25 'reduc':11 'repair':15 'semiconductor':44,65 'servic':28 'softwar':4,34,47 'sold':68 'support':8 'time':13 'tool':19,38 'treat':52 'unit':71 'uptim':20 'use':49,60

Lithographic machines for producing images, and printing or implanting images on wafers and other substrates

'imag':5,10 'implant':9 'lithograph':1 'machin':2 'print':7 'produc':4 'substrat':15 'wafer':12

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