Laser-Based Micromachining System, comprising a laser used for material removal, a precision positioning stage and a video inspection system, used for micromachining applications, namely, the cutting, ablation or other removal of material from microelectronics components

'ablat':29 'applic':25 'base':3 'compon':37 'compris':6 'cut':28 'inspect':20 'laser':2,8 'laser-bas':1 'materi':11,34 'microelectron':36 'micromachin':4,24 'name':26 'posit':15 'precis':14 'remov':12,32 'stage':16 'system':5,21 'use':9,22 'video':19

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