Semiconductor wafer processing equipment, and components, namely; epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers; and operational software sold as a component of the foregoing; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers

'chemic':10,23 'compon':6,32 'deposit':12,16 'disc':48 'epitaxi':8 'equip':4 'etcher':19 'film':46 'forego':35 'implant':21 'ion':20 'mechan':24 'name':7 'oper':27 'physic':14 'plasma':18 'polish':25 'process':3,39 'product':41 'reactor':9,13,17 'semiconductor':1,43 'silicon':47 'softwar':28 'sold':29 'substrat':44 'thin':45 'vapor':11,15 'wafer':2,50

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