Machines for the manufacture of integrated circuits and semi-conductors by lithographic means in the nature of steppers and scanners

'circuit':7 'conductor':11 'integr':6 'lithograph':13 'machin':1 'manufactur':4 'mean':14 'natur':17 'scanner':21 'semi':10 'semi-conductor':9 'stepper':19

[ Maintenance and repair of machines, apparatus and instruments for use in the field of micro-lithography ]

'apparatus':6 'field':13 'instrument':8 'lithographi':17 'machin':5 'mainten':1 'micro':16 'micro-lithographi':15 'repair':3 'use':10

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