U.S. federal trademark · Serial No. 79068541 · Reg. No. 3793259
Software for computational lithography, namely, software for controlling lithographic processes and for improving the integration between different lithographic processes; computer operating system software for use in computational lithography; computational lithography software for use in the design, simulation, testing, optimization and fabrication of photolithographic masks, semiconductors, integrated circuits, computer wafers, computer memory chips, magnetic heads, computer chips, and integrated optical systems
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