Epitaxially coated semiconductor wafers and downloadable and/or recorded operational software; downloadable and/or recorded software for controlling equipment for semiconductor manufacturing

'and/or':7,12 'coat':2 'control':16 'download':6,11 'epitaxi':1 'equip':17 'manufactur':20 'oper':9 'record':8,13 'semiconductor':3,19 'softwar':10,14 'wafer':4

Equipment for semiconductor manufacturing, namely, CVD (Chemical Vapor Deposition) and MOCVD (Metallorganic) epitaxial reactors, bubblers for low volatile semiconductor precursors; physical vapor transport (PVT) sublimators for compound materials growth, high temperature chemical vapor deposition (HTCVD) reactors for compound materials growth, LPCVD (Low Pressure Chemical Vapor Deposition) reactors

'bubbler':15 'chemic':7,32,44 'compound':27,38 'cvd':6 'deposit':9,34,46 'epitaxi':13 'equip':1 'growth':29,40 'high':30 'htcvd':35 'low':17,42 'lpcvd':41 'manufactur':4 'materi':28,39 'metallorgan':12 'mocvd':11 'name':5 'physic':21 'precursor':20 'pressur':43 'pvt':24 'reactor':14,36,47 'semiconductor':3,19 'sublim':25 'temperatur':31 'transport':23 'vapor':8,22,33,45 'volatil':18

Equipment engineering, namely, installation, maintenance and repair for semiconductor manufacturing equipment

'engin':2 'equip':1,11 'instal':4 'mainten':5 'manufactur':10 'name':3 'repair':7 'semiconductor':9

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