Automated optical inspection and metrology system comprised primarily of computers, computer hardware, calculating machines, and recorded and downloadable computer software, electrical and optical measurement devices and computer peripheral devices all for advanced process control during manufacturing of integrated circuit substrates

'advanc':32 'autom':1 'calcul':13 'circuit':39 'compris':7 'comput':10,11,19,27 'control':34 'devic':25,29 'download':18 'electr':21 'hardwar':12 'inspect':3 'integr':38 'machin':14 'manufactur':36 'measur':24 'metrolog':5 'optic':2,23 'peripher':28 'primarili':8 'process':33 'record':16 'softwar':20 'substrat':40 'system':6

LUMINA

Owners

Goods & Services