U.S. federal trademark · Serial No. 78761910 · Reg. No. 3545214
Semi-conductor manufacturing apparatus, namely, Semiconductor manufacturing machines, Semiconductor substrates manufacturing machines; Wafer processing apparatus for semiconductor manufacturing apparatus, namely, Semiconductor wafer processing machines, Semiconductor wafer processing equipment; Plasma etching and ashing machines; Plasma processing apparatus for ashing and etching for manufacturing Micro Electro Mechanical Systems, namely, Plasma processing machines for ashing and etching for manufacturing Micro Electro Mechanical Systems; Plasma processing apparatus for ashing and etching for manufacturing optical elements, namely, plasma processing machines for ashing and etching for manufacturing optical elements
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