Machines used in the manufacturing of semiconductor devices, namely sputtering machines, vacuum evaporation machines, integrated circuit production machines, semiconductor production machines, CVD machines, plasma polymerization machines, vacuum thin film production machines, etching machines, plasma processing machines, ion implantation machines, surface processing machines, plating machines, spin coating machines, gas deposition machines; machines for manufacturing liquid crystal displays, plasma displays and electric luminescent display panels

'circuit':16 'coat':46 'crystal':55 'cvd':22 'deposit':49 'devic':8 'display':56,58,62 'electr':60 'etch':32 'evapor':13 'film':29 'gas':48 'implant':38 'integr':15 'ion':37 'liquid':54 'luminesc':61 'machin':1,11,14,18,21,23,26,31,33,36,39,42,44,47,50,51 'manufactur':5,53 'name':9 'panel':63 'plasma':24,34,57 'plate':43 'polymer':25 'process':35,41 'product':17,20,30 'semiconductor':7,19 'spin':45 'sputter':10 'surfac':40 'thin':28 'use':2 'vacuum':12,27

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