equipment for the treatment and processing of semiconductor substrates and other semiconductor workpieces, semiconductor substrates, silicon wafers and semiconductor wafers, including equipment for rapid thermal processing, dry strip, and etch applications

'applic':31 'dri':27 'equip':1,22 'etch':30 'includ':21 'process':6,26 'rapid':24 'semiconductor':8,12,14,19 'silicon':16 'strip':28 'substrat':9,15 'thermal':25 'treatment':4 'wafer':17,20 'workpiec':13

servicing of equipment for the treatment and processing of substrates and other workpieces, semiconductor substrates, silicon wafers and wafers, including equipment for rapid thermal processing, dry strip, and etch applications

'applic':30 'dri':26 'equip':3,21 'etch':29 'includ':20 'process':8,25 'rapid':23 'semiconductor':14 'servic':1 'silicon':16 'strip':27 'substrat':10,15 'thermal':24 'treatment':6 'wafer':17,19 'workpiec':13

MATTSON TECHNOLOGY

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