Mechanical semiconductor manufacturing machines for the production of semiconductors and parts therefor; electronically controlled semiconductor manufacturing machines for the production of semiconductors and parts therefor

'control':14 'electron':13 'machin':4,17 'manufactur':3,16 'mechan':1 'part':11,24 'product':7,20 'semiconductor':2,9,15,22 'therefor':12,25

Apparatus for the chemical treatment of semiconductors, namely, chemical vapor deposition electrical reactors and atomic layer deposition electrical reactors for the deposition of thin films operating with electric gas-discharge and parts therefor

'apparatus':1 'atom':15 'chemic':4,9 'deposit':11,17,22 'discharg':31 'electr':12,18,28 'film':25 'gas':30 'gas-discharg':29 'layer':16 'name':8 'oper':26 'part':33 'reactor':13,19 'semiconductor':7 'therefor':34 'thin':24 'treatment':5 'vapor':10

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