Semiconductor wafer processing machines, operational software, and components; namely, epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, wafer cleaning equipment and chemical mechanical polishers; all for the processing and production of semiconductor substrates, thin films, silicon discs and wafers

'chemic':12,28 'clean':25 'compon':8 'deposit':14,18 'disc':43 'epitaxi':10 'equip':26 'etcher':21 'film':41 'implant':23 'ion':22 'machin':4 'mechan':29 'name':9 'oper':5 'physic':16 'plasma':20 'polish':30 'process':3,34 'product':36 'reactor':11,15,19 'semiconductor':1,38 'silicon':42 'softwar':6 'substrat':39 'thin':40 'vapor':13,17 'wafer':2,24,45

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