engineering design and layout of microsystems and components thereof and software modeling of same

'compon':8 'design':2 'engin':1 'layout':4 'microsystem':6 'model':12 'softwar':11 'thereof':9

microsystems for fluid handling, integrated microsystems, and components for microsystems, namely, flowchannels, pumps, valves, flowmeters, filters, fluid interconnects, gears, rotors, and assemblies for fluid handling; enclosures for microsystems, namely, cavities, molds, lids, and bonding surfaces; microsystem interconnects, namely, electrical connectors, mechanical connectors, plugs, pins, and optical fiber connectors; precision micromechanical components and modules, namely, gear trains for power transmission, rotors, levers, actuators, and optical mirrors; microelectro-magnetic components and modules, namely, relays, electromagnetic windings, motors, and magnets; and CAD/CAM software for microelectro-mechanical systems technology

'actuat':62 'assembl':22 'bond':34 'cad/cam':80 'caviti':30 'compon':8,51,69 'connector':40,42,48 'electr':39 'electromagnet':74 'enclosur':26 'fiber':47 'filter':16 'flowchannel':12 'flowmet':15 'fluid':3,17,24 'gear':19,55 'handl':4,25 'integr':5 'interconnect':18,37 'lever':61 'lid':32 'magnet':68,78 'mechan':41,85 'microelectro':67,84 'microelectro-magnet':66 'microelectro-mechan':83 'micromechan':50 'microsystem':1,6,10,28,36 'mirror':65 'modul':53,71 'mold':31 'motor':76 'name':11,29,38,54,72 'optic':46,64 'pin':44 'plug':43 'power':58 'precis':49 'pump':13 'relay':73 'rotor':20,60 'softwar':81 'surfac':35 'system':86 'technolog':87 'train':56 'transmiss':59 'valv':14 'wind':75

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