repair and maintenance of semiconductor wafer processing equipment, and parts thereof

'equip':8 'mainten':3 'part':10 'process':7 'repair':1 'semiconductor':5 'thereof':11 'wafer':6

semiconductor wafer processing equipment and parts thereof, namely, epitaxial reactors, chemical vapor deposition reactors, plasma etchers, ion implanters, chemical mechanical polishers, and parts thereof; and computer software for operational use therewith

'chemic':11,19 'comput':26 'deposit':13 'epitaxi':9 'equip':4 'etcher':16 'implant':18 'ion':17 'mechan':20 'name':8 'oper':29 'part':6,23 'plasma':15 'polish':21 'process':3 'reactor':10,14 'semiconductor':1 'softwar':27 'thereof':7,24 'therewith':31 'use':30 'vapor':12 'wafer':2

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