Metrology tool for optically measuring properties of semiconductor wafers at various stages during fabrication of semiconductor devices, including an optical sensor, a wafer-support stage, electronic data processing means, and mechanical and software interfaces for integration with wafer-loading tools and wafer-processing tools

'data':28 'devic':17 'electron':27 'fabric':14 'includ':18 'integr':37 'interfac':35 'load':41 'mean':30 'measur':5 'mechan':32 'metrolog':1 'optic':4,20 'process':29,46 'properti':6 'semiconductor':8,16 'sensor':21 'softwar':34 'stage':12,26 'support':25 'tool':2,42,47 'various':11 'wafer':9,24,40,45 'wafer-load':39 'wafer-process':44 'wafer-support':23

METROLOGY 1, 2, 3

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