Polymer film used for manufacturing integrated circuit devices, compound semiconductor devices, microelectromechanical devices, information displays, other circuited devices, and the leads, interconnects, and packages by which such devices can be integrated with other components

'circuit':7,17 'compon':34 'compound':9 'devic':8,11,13,18,28 'display':15 'film':2 'inform':14 'integr':6,31 'interconnect':22 'lead':21 'manufactur':5 'microelectromechan':12 'packag':24 'polym':1 'semiconductor':10 'use':3

Chemicals for use in the manufacture of integrated circuit devices, compound semiconductor devices, microelectromechanical devices, information displays, other circuited devices, and the leads, interconnects, and packages by which such devices can be integrated with other components; photoresists

'chemic':1 'circuit':9,19 'compon':36 'compound':11 'devic':10,13,15,20,30 'display':17 'inform':16 'integr':8,33 'interconnect':24 'lead':23 'manufactur':6 'microelectromechan':14 'packag':26 'photoresist':37 'semiconductor':12 'use':3

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