micro-machined electronic parts as components for use in miniaturized fabrication equipment for the manufacture of electronic components; mechanical and electromechanical components and devices; sensors and actuators; and microoptical equipment

'actuat':28 'compon':7,19,23 'devic':25 'electromechan':22 'electron':4,18 'equip':13,31 'fabric':12 'machin':3 'manufactur':16 'mechan':20 'micro':2 'micro-machin':1 'microopt':30 'miniatur':11 'part':5 'sensor':26 'use':9

machines used to manufacture micro-machined electronic components

'compon':9 'electron':8 'machin':1,7 'manufactur':4 'micro':6 'micro-machin':5 'use':2

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