An optical metrology system for nanometrology comprised of a light source, a camera and sensors in communication with computer software and hardware, for non-contact dimensional measurement of semiconductor wafers, micro electo-mechanical systems and micro-fabricated electronic assemblies

'assembl':42 'camera':13 'communic':17 'compris':7 'comput':19 'contact':26 'dimension':27 'electo':34 'electo-mechan':33 'electron':41 'fabric':40 'hardwar':22 'light':10 'measur':28 'mechan':35 'metrolog':3 'micro':32,39 'micro-fabr':38 'nanometrolog':6 'non':25 'non-contact':24 'optic':2 'semiconductor':30 'sensor':15 'softwar':20 'sourc':11 'system':4,36 'wafer':31

MICROLINE

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