electronic microscopes, scanning electron microscopes, and electronic instruments for measuring, testing, and surveying critical dimensions for use in wafer process evaluation and for other measuring purposes

'critic':14 'dimens':15 'electron':1,4,7 'evalu':21 'instrument':8 'measur':10,25 'microscop':2,5 'process':20 'purpos':26 'scan':3 'survey':13 'test':11 'use':17 'wafer':19

medical X-ray apparatus; electronic microscopes and scanning electron microscopes for medical use and diagnosis

'apparatus':5 'diagnosi':16 'electron':6,10 'medic':1,13 'microscop':7,11 'ray':4 'scan':9 'use':14 'x':3 'x-ray':2

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