Laboratory apparatus and instruments, namely, combined electron and optical microscopes; optical apparatus and instruments, namely, optical microscopes; measuring or testing machines and instruments, namely, review systems for analyzing or measuring material, namely, wafer defect inspection instruments, pattern measuring instruments; industrial X-ray machines and apparatus not for medical use; electron microscopes

'analyz':28 'apparatus':2,12,46 'combin':6 'defect':34 'electron':7,51 'industri':40 'inspect':35 'instrument':4,14,23,36,39 'laboratori':1 'machin':21,44 'materi':31 'measur':18,30,38 'medic':49 'microscop':10,17,52 'name':5,15,24,32 'optic':9,11,16 'pattern':37 'ray':43 'review':25 'system':26 'test':20 'use':50 'wafer':33 'x':42 'x-ray':41

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