Fiber optic temperature sensors; optical amplifiers; temperature sensors; fiber optic temperature sensors using fiber bragg gratings; fiber optic position sensors

'amplifi':6 'bragg':15 'fiber':1,9,14,17 'grate':16 'optic':2,5,10,18 'posit':19 'sensor':4,8,12,20 'temperatur':3,7,11 'use':13

'equip':4 'process':3 'semiconductor':1 'wafer':2

Engineering and design of measurement technology in the field of semiconductor industries; research in the area of semiconductor processing technology; technical consultancy in relation to the engineering methods and use of devices in the field of semiconductor processing technology

'area':16 'consult':22 'design':3 'devic':32 'engin':1,27 'field':9,35 'industri':12 'measur':5 'method':28 'process':19,38 'relat':24 'research':13 'semiconductor':11,18,37 'technic':21 'technolog':6,20,39 'use':30

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