integrated circuits; electronics; microsystems; oscillator circuits; oscillator control circuits; mems based circuits; mems based clock generation circuits; computer hardware; sensing circuits; processing circuits; actuating circuits; hybrid circuits; hybrid multi-chip circuits; on-chip clock generators

'actuat':24 'base':11,14 'chip':31,35 'circuit':2,6,9,12,17,21,23,25,27,32 'clock':15,36 'comput':18 'control':8 'electron':3 'generat':16,37 'hardwar':19 'hybrid':26,28 'integr':1 'mem':10,13 'microsystem':4 'multi':30 'multi-chip':29 'on-chip':33 'oscil':5,7 'process':22 'sens':20

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