Software-controlled systems used in the semiconductor manufacturing industry, namely, recorded software for automating and controlling machines that manufacture semiconductors and computer memory hardware containing the foregoing recorded software; computer software for use with semiconductor wafer processing equipment for automating and controlling machines that manufacture semiconductor wafers

'autom':15,41 'comput':23,31 'contain':26 'control':3,17,43 'equip':39 'forego':28 'hardwar':25 'industri':10 'machin':18,44 'manufactur':9,20,46 'memori':24 'name':11 'process':38 'record':12,29 'semiconductor':8,21,36,47 'softwar':2,13,30,32 'software-control':1 'system':4 'use':5,34 'wafer':37,48

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