Equipment, namely, interface or connecting means or devices, and operational software for interfacing components of semiconductor wafer processing systems in the nature of epitaxial reactors, chemical vapor deposition reactors, physical vapor deposition reactors, plasma etchers, ion implanters, and chemical mechanical polishers

'chemic':26,39 'compon':14 'connect':5 'deposit':28,32 'devic':8 'epitaxi':24 'equip':1 'etcher':35 'implant':37 'interfac':3,13 'ion':36 'mean':6 'mechan':40 'name':2 'natur':22 'oper':10 'physic':30 'plasma':34 'polish':41 'process':18 'reactor':25,29,33 'semiconductor':16 'softwar':11 'system':19 'vapor':27,31 'wafer':17

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