Semiconductor fabrication machines; machines for fabricating Micro-Electrical-Machine systems (MEMS)comprised of mechanical elements, sensors, actuators and electronics on a common silicon substrate; thin film fabrication machines; plasma generating machines for use in the manufacture of semiconductors [ ; and parts for all the aforesaid goods]

'actuat':18 'aforesaid':45 'common':23 'compris':13 'electr':9 'electron':20 'element':16 'fabric':2,6,28 'film':27 'generat':31 'good':46 'machin':3,4,10,29,32 'manufactur':37 'mechan':15 'mem':12 'micro':8 'micro-electrical-machin':7 'part':41 'plasma':30 'semiconductor':1,39 'sensor':17 'silicon':24 'substrat':25 'system':11 'thin':26 'use':34

MORI

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