Thin film thickness measurement systems composed of spectrometers, polychromatic light sources, namely, Tungsten-Halogen, Deuterium, Xenon; LEDs (light-emitting diodes) and fiber optics cables, optical lenses and software for data acquisition, simulation and regression provided therewith for measuring the thickness and/or refractive index of translucent films

'acquisit':33 'and/or':43 'cabl':26 'compos':6 'data':32 'deuterium':16 'diod':22 'emit':21 'fiber':24 'film':2,48 'halogen':15 'index':45 'led':18 'lens':28 'light':10,20 'light-emit':19 'measur':4,40 'name':12 'optic':25,27 'polychromat':9 'provid':37 'refract':44 'regress':36 'simul':34 'softwar':30 'sourc':11 'spectromet':8 'system':5 'therewith':38 'thick':3,42 'thin':1 'transluc':47 'tungsten':14 'tungsten-halogen':13 'xenon':17

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