software expert system for the automatic analysis of optical data, e;g;, reflectometry, ellipsometry, scatterometry, or any combination thereof, to determine film thicknesses and/or optical constants of materials; It is applicable to single films or multiple-film stacks on any sample

'analysi':7 'and/or':24 'applic':31 'automat':6 'combin':18 'constant':26 'data':10 'determin':21 'e':11 'ellipsometri':14 'expert':2 'film':22,34,38 'g':12 'materi':28 'multipl':37 'multiple-film':36 'optic':9,25 'reflectometri':13 'sampl':42 'scatterometri':15 'singl':33 'softwar':1 'stack':39 'system':3 'thereof':19 'thick':23

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