U.S. federal trademark · Serial No. 78431743 · Reg. No. AM8173/2003
Machines and structural parts therefor, for the production, treatment, transport and processing of electronic components, namely, semiconductors, in the field of microelectronic, medical technology, biotechnology, semiconductor technology and microsystems technology; machines and structural parts therefor, for the production, treatment and processing of semiconductors; machines and structural parts therefore, for treatment of surfaces of electronic components, namely, wafers
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