Micromechanical instruments with electrical and mechanical characterization capabilities for data acquisition and testing in the nature of indentation, lateral force, scratch, and fatigue testing, scanning probe imaging and/or wear testing of surfaces, coatings, membranes, thin films, MENS/NEMS devices, biological materials and/or material interfaces, with the testing instruments being comprised of a probe, transducer, electrostatic controller, electrical source and meter, and computer firmware

'acquisit':11 'and/or':28,41 'biolog':39 'capabl':8 'character':7 'coat':33 'compris':49 'comput':61 'control':55 'data':10 'devic':38 'electr':4,56 'electrostat':54 'fatigu':23 'film':36 'firmwar':62 'forc':20 'imag':27 'indent':18 'instrument':2,47 'interfac':43 'later':19 'materi':40,42 'mechan':6 'membran':34 'mens/nems':37 'meter':59 'micromechan':1 'natur':16 'probe':26,52 'scan':25 'scratch':21 'sourc':57 'surfac':32 'test':13,24,30,46 'thin':35 'transduc':53 'wear':29

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