scientific instruments, based principally upon optical microscope, electron microscope, spectrophotometer, ellipsometer and scanning slit densitometer technology, for metrology purposes, namely, apparatus for measuring physical dimensions of samples and thicknesses of deposited films or for analyzing chemical composition of materials

'analyz':35 'apparatus':21 'base':3 'chemic':36 'composit':37 'densitomet':15 'deposit':31 'dimens':25 'electron':8 'ellipsomet':11 'film':32 'instrument':2 'materi':39 'measur':23 'metrolog':18 'microscop':7,9 'name':20 'optic':6 'physic':24 'princip':4 'purpos':19 'sampl':27 'scan':13 'scientif':1 'slit':14 'spectrophotomet':10 'technolog':16 'thick':29 'upon':5

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