Sensor Assembly Used As A Part Of A Measurement System To Provide Surface Shape, Form, Size, Texture, And/Or Dimensional Information About Parts, Components, Mechanisms, And;/Or Assemblies Made Of Nearly Any Material, With Sub-Micron Resolution

'/or':26 'and/or':18 'assembl':2,27 'compon':23 'dimension':19 'form':15 'inform':20 'made':28 'materi':32 'measur':9 'mechan':24 'micron':36 'near':30 'part':6,22 'provid':12 'resolut':37 'sensor':1 'shape':14 'size':16 'sub':35 'sub-micron':34 'surfac':13 'system':10 'textur':17 'use':3

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