U.S. federal trademark · Serial No. 86743090 · Reg. No. 5355578
Industrial production machines for treating and processing microelectronic substrates, namely, semiconductor wafers, semiconductor substrates, micromachine substrates, flat panel displays and data disks, namely, automated multi-station fluid processing machine systems for the manufacture and processing of microelectronic substrates comprising substrate handling machines, substrate chemical processing machines and related controllers sold as a unit
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