Construction, installation, maintenance, and deinstallation of wet, dry, thermal, and catalytic systems used in substrate processing, namely, depositing, etching, inspecting, polishing and cleaning of substrates and the treatment of gaseous and liquid effluents from manufacturing processes

'catalyt':11 'clean':23 'construct':1 'deinstal':5 'deposit':18 'dri':8 'effluent':33 'etch':19 'gaseous':30 'inspect':20 'instal':2 'liquid':32 'mainten':3 'manufactur':35 'name':17 'polish':21 'process':16,36 'substrat':15,25 'system':12 'thermal':9 'treatment':28 'use':13 'wet':7

Chambers for use in the disposal of waste materials, namely, combustion chambers, gas handling apparatus, gas purifiers, gas scrubbers, gas storage/delivery machines, in-situ gas generation machines, wet, dry, thermal, and catalytic scrubbers for the treatment of gaseous and liquid effluents from manufacturing processes

'apparatus':15 'catalyt':33 'chamber':1,12 'combust':11 'dispos':6 'dri':30 'effluent':42 'gas':13,16,18,20,26 'gaseous':39 'generat':27 'handl':14 'in-situ':23 'liquid':41 'machin':22,28 'manufactur':44 'materi':9 'name':10 'process':45 'purifi':17 'scrubber':19,34 'situ':25 'storage/delivery':21 'thermal':31 'treatment':37 'use':3 'wast':8 'wet':29

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