Piezoelectric actuators, micro and nano-positioning stages, and controllers and parts therefor, namely [ piezoelectric crystals, one- , two-, and three-dimensional positioning stages, and ] control circuits therefor [ ; atomic force and scanned-probe microscopes and parts therefor; and carbon nanotubes for use as probe tips in atomic force and scanned-probe microscopes ]

'actuat':2 'atom':29,48 'carbon':40 'circuit':27 'control':10,26 'crystal':16 'dimension':22 'forc':30,49 'micro':3 'microscop':35,54 'name':14 'nano':6 'nano-posit':5 'nanotub':41 'one':17 'part':12,37 'piezoelectr':1,15 'posit':7,23 'probe':34,45,53 'scan':33,52 'scanned-prob':32,51 'stage':8,24 'therefor':13,28,38 'three':21 'three-dimension':20 'tip':46 'two':18 'use':43

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