Ozone gas generator and delivery systems comprised primarily of a pump, vaporizer, and power controller, used in the semiconductor and thin film coating markets for photoresist and contaminant removal, cleaning, oxide growth, and surface conditioning

'clean':30 'coat':23 'compris':7 'condit':35 'contamin':28 'control':15 'deliveri':5 'film':22 'gas':2 'generat':3 'growth':32 'market':24 'oxid':31 'ozon':1 'photoresist':26 'power':14 'primarili':8 'pump':11 'remov':29 'semiconductor':19 'surfac':34 'system':6 'thin':21 'use':16 'vapor':12

O3MEGA

Owners

Goods & Services