U.S. federal trademark · Serial No. 76188474 · Reg. No. 2701761
Cluster tool integration platform, comprising reactive plasma cleaning chamber, robotic central distribution module, organic deposition chamber, linear sputter deposition chamber, metal deposition chamber, optional process chamber, shadow mask storage chamber and entry and exit load locks, all for use in the deposition of organic and metal thin films in connection with the fabrication of organic and polymeric light emitting devices (OLED and PLED) and related displays
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