Computer software which remotely and locally collects data regarding the condition and functionality of semiconductor manufacturing equipment, compares the data against pre-set control limits and provides auto-corrections to the hardware

'auto':30 'auto-correct':29 'collect':7 'compar':18 'comput':1 'condit':11 'control':25 'correct':31 'data':8,20 'equip':17 'function':13 'hardwar':34 'limit':26 'local':6 'manufactur':16 'pre':23 'pre-set':22 'provid':28 'regard':9 'remot':4 'semiconductor':15 'set':24 'softwar':2

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