Hardware and software for operating and charging metrology equipment in semiconductor processing environments; load ports; electronic equipment including front-opening unified pods (FOUPs); software for communication between load ports and wafer sensors

'charg':7 'communic':27 'electron':16 'environ':13 'equip':9,17 'foup':24 'front':20 'front-open':19 'hardwar':1 'includ':18 'load':14,29 'metrolog':8 'open':21 'oper':5 'pod':23 'port':15,30 'process':12 'semiconductor':11 'sensor':33 'softwar':3,25 'unifi':22 'wafer':32

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