Semiconductor manufacturing machines, namely, load ports

'load':5 'machin':3 'manufactur':2 'name':4 'port':6 'semiconductor':1

Computer hardware and downloadable and recorded computer software for operating and charging metrology equipment in semiconductor processing environments; semiconductor devices, namely, load ports; electronic equipment, namely, semiconductor devices in the nature of front-opening unified pods (FOUPs); downloadable and recorded computer software for communication between semiconductor load ports and wafer sensors

'charg':12 'communic':45 'comput':1,7,42 'devic':20,28 'download':4,39 'electron':24 'environ':18 'equip':14,25 'foup':38 'front':34 'front-open':33 'hardwar':2 'load':22,48 'metrolog':13 'name':21,26 'natur':31 'open':35 'oper':10 'pod':37 'port':23,49 'process':17 'record':6,41 'semiconductor':16,19,27,47 'sensor':52 'softwar':8,43 'unifi':36 'wafer':51

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