Machines for manufacturing semiconductors

'machin':1 'manufactur':3 'semiconductor':4

Apparatus for thin film deposition, including atomic layer deposition, namely, a reaction chamber, an energy source, means for introducing precursor and substrate chemical preparations into the reaction chamber, and sensors for measuring and monitoring deposition growth

'apparatus':1 'atom':7 'chamber':13,28 'chemic':23 'deposit':5,9,35 'energi':15 'film':4 'growth':36 'includ':6 'introduc':19 'layer':8 'mean':17 'measur':32 'monitor':34 'name':10 'precursor':20 'prepar':24 'reaction':12,27 'sensor':30 'sourc':16 'substrat':22 'thin':3

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