electronic and electro-mechanical devices used to measure the flatness of rotating objects; namely, optical storage media, magnetic storage media, semiconductor wafers, toner drums, turbine rotors, spindle shafts, as well as other cylindrical or flat rotating objects

'cylindr':34 'devic':6 'drum':25 'electro':4 'electro-mechan':3 'electron':1 'flat':11,36 'magnet':19 'measur':9 'mechan':5 'media':18,21 'name':15 'object':14,38 'optic':16 'rotat':13,37 'rotor':27 'semiconductor':22 'shaft':29 'spindl':28 'storag':17,20 'toner':24 'turbin':26 'use':7 'wafer':23 'well':31

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