OPTIPATH

Owner

Goods & Services

Semiconductor substrates manufacturing machines; Automated transport chambers for semiconductor manufacturing; Semiconductor manufacturing machines; Semiconductor substrate processing machines; Semiconductor substrate processing equipment; Electromagnetic levitation-based material handling machines and apparatus for transporting semiconductor substrates and wafers, silicon substrates, reticles, and panels; Transport chambers, vacuum chambers, wafer movers, load ports, slot valves, and modular transport chambers for transporting substrates, semiconductor wafers, silicon substrates, reticles, and panels; Equipment front-end modules (EFEMs) for loading and unloading substrates, semiconductor wafers, silicon substrates, reticles, and panels; Load ports for semiconductor manufacturing machines