Vacuum-compatible substrate carriers for storing and transporting wafers, reticles, silicon substrates, and panels; Semiconductor substrate carriers for use with semiconductor processing equipment; Scientific apparatus and instruments, namely, ultra-high vacuum chambers; High-purity vacuum carriers, namely, specially adapted containers for storing and transporting substrates, reticles, silicon substrates, and panels

'adapt':42 'apparatus':26 'carrier':5,18,39 'chamber':34 'compat':3 'contain':43 'equip':24 'high':32,36 'high-pur':35 'instrument':28 'name':29,40 'panel':15,53 'process':23 'puriti':37 'reticl':11,49 'scientif':25 'semiconductor':16,22 'silicon':12,50 'special':41 'store':7,45 'substrat':4,13,17,48,51 'transport':9,47 'ultra':31 'ultra-high':30 'use':20 'vacuum':2,33,38 'vacuum-compat':1 'wafer':10

Semiconductor substrate processing machines; Semiconductor substrate processing equipment; Semiconductor substrates manufacturing machines; Semiconductor manufacturing machines

'equip':8 'machin':4,12,15 'manufactur':11,14 'process':3,7 'semiconductor':1,5,9,13 'substrat':2,6,10

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