Optical measuring systems for in-line or in situ thin-film optical quality control inspection, namely, optical spectrometers, spectrum analyzers used for the detection, processing and illustration of light signals in a frequency range and spectral photometers

'analyz':22 'control':16 'detect':26 'film':13 'frequenc':35 'illustr':29 'in-lin':5 'inspect':17 'light':31 'line':7 'measur':2 'name':18 'optic':1,14,19 'photomet':39 'process':27 'qualiti':15 'rang':36 'signal':32 'situ':10 'spectral':38 'spectromet':20 'spectrum':21 'system':3 'thin':12 'thin-film':11 'use':23

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